SE31 Slot die wet film metrology module
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SE31-FM Wide Band Dual-Use Optical Film Thickness Monitor
The SE31-FM is a Wide Band Dual-Use Optical Film Thickness Monitor from TDM Technology. SE31-FM wide band dual-use optical film thickness monitor for in-situ coating process monitoring. It is part of the In-situ Real-time Monitoring series.
Specifications
| Spectral Range | 350nm ~ 2400nm (Visible + Near-infrared Full Band) |
|---|---|
| Measurement Mode | Transmission (T) / Reflection (R) Intelligently Auto-switching |
| Wavelength Resolution | < 0.2nm (High-resolution Spectrum Acquisition & Analysis) |
| System Noise Level | ± 0.001% (Ensuring Long-term Data Stability) |
| Monitoring Accuracy | Film thickness accuracy ±0.1% (Based on standard optical film systems) |
| Communication & Control | RS-232/485, TCP/IP, Analog Output, PLC Integration Supported |
| Compatible Materials | SiO₂, MgF₂, Al₂O₃, Ta₂O₅, Nb₂O₅, TiO₂, Si₃N₄, etc. |
