SE31 Slot die wet film metrology module
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SE310 Slot Die Wet Film Metrology Module
The SE310 is a Slot die wet film metrology module from TDM Technology. SE310 slot-die wet film metrology module for in-situ thickness and reflectance monitoring. 350–1100nm halogen source, 300nm–20µm thickness range and 15Hz sampling. It is part of the In-situ Real-time Monitoring series.
Specifications
| Product Model | SE310 |
|---|---|
| Dimensions | 190mm × 176mm × 70mm |
| Weight | < 500g |
| Light Source Type | Halogen Lamp |
| Light Source Wavelength | 350 – 1100 nm |
| Spectrometer Range | 200 – 1100 nm |
| Optical Filter | Customized |
| Film Thickness Measurement Range | 300nm – 20µm |
| Measurement Repeatability | < 1% |
| Sampling Mode | Continuous Single Spot |
| Sampling Frequency | 15Hz |
| Spot Size | 1.5~2mm |
| Working Distance | < 5mm |
| Data Processing Time | < 1s |
| Data Processing Method | Local Computing Server |
| Rated Voltage | Computing Server: 110V - 220V; Detection Module: 24V |
| Rated Power | < 200W (Including Server) |
Install_notes
Mounted on the coating head
Process
Wet Film Coating Process
Metrology
Thickness
Reflectance
Functionalities
The module shall be mounted on the coating head
The SDK is integrated into the computing server
Ethernet and power supply cables connect computing server and modules
Slot die machine provides starting/stopping trigger signals to the system
Advantages
Modular design for easy installation
Real-time data feedback during process
Easy deployment with computer & software connected
